引用本文:卞凯,唐思文,王睿,杨植富,张浩,刘骞,刘德顺.纳米Al2O3/TiO2多层涂层的低温制备及其性能*[J].中国表面工程,2022,35(3):245~253
BIAN Kai,TANG Siwen,WANG Rui,YANG Zhifu,ZHANG Hao,LIU Qian,LIU Deshun.Low-temperature Preparation and Performance Research of Nano-Al2O3 / TiO2 Multilayer Coating[J].China Surface Engineering,2022,35(3):245~253
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纳米Al2O3/TiO2多层涂层的低温制备及其性能*
卞凯1, 唐思文1, 王睿1, 杨植富1, 张浩1, 刘骞2, 刘德顺3
1.湖南科技大学机械设备健康维护湖南省重点实验室 湘潭 411201;2.湖南科技大学高温耐磨材料及制备技术湖南省国防科技重点实验室 湘潭 411201;3.湖南科技大学深海深地矿产资源开发技术与装备教育部工程研究中心 湘潭 411201
摘要:
采用原子层沉积技术(ALD)在 200 ℃低温条件下将纳米 Al2O3 / TiO2 多层涂层沉积在硬质合金刀具表面。利用扫描电镜 SEM、划痕测试仪和三向测力仪以及数控机床等设备，对不同形式的纳米 Al2O3 / TiO2 多层涂层刀具的涂层-基体结合力和切削性能等进行研究。结果表明，基于原子层沉积技术低温制备的纳米多层涂层刀具的涂层-基体结合强度高；涂层层数、 涂层沉积顺序及涂层层厚比对纳米多层涂层刀具的切削力有不同程度的影响；纳米多层涂层刀具更适合高速切削，当切削速度大于 2.33 m / s 时，纳米多层涂层刀具的切削力和摩擦因数呈下降趋势，表现出良好的切削性能，其中双层纳米涂层刀具的切削性能更好；在高速切削时，纳米多层涂层刀具表面摩擦因数比普通未涂层硬质合金刀具低，纳米 Al2O3 / TiO2 多层涂层能够有效改善刀具的黏结磨损，减少刀-屑粘黏现象和烫伤现象，能够改善刀具表面的耐磨损性能。
关键词:  原子层沉积  低温制备  纳米多层涂层  涂层-基体结合力  切削性能
DOI：10.11933/j.issn.1007-9289.20210512002
分类号:TG174
基金项目:湖南省自然科学基金面上(2020JJ4308)；湖南省教育厅科研(18B230)资助项目
Low-temperature Preparation and Performance Research of Nano-Al2O3 / TiO2 Multilayer Coating
BIAN Kai1, TANG Siwen1, WANG Rui1, YANG Zhifu1, ZHANG Hao1, LIU Qian2, LIU Deshun3
1.Hunan Provincial Key Laboratory of Health Maintenance for Mechanical Equipment,Hunan University of Science and Technology, Xiangtan 411201 , China;2.Hunan Provincial Key Defense Laboratory of High Temperature Wear Resisting Materials andPreparation Technology, Hunan University of Science and Technology, Xiangtan 411201 , China;3.Engineering Research Center of Mineral Resources Development Technology and Equipment for Deep Sea andDeep Earth, Ministry of Education, Hunan University of Science and Technology, Xiangtan 411201 , China
Abstract:
Nano-Al2O3 / TiO2 multilayer coatings are deposited on the surface of cemented carbide tools at a low temperature of 200 ℃ by atomic layer deposition (ALD). The adhesion of coating-substrate and the cutting performance of different nano-Al2O3 / TiO2 multilayer coating tools are studied by SEM, and three-scratch tester dynamometer and CNC machine tools. The results show that the adhesion of coating-substrate of the nano-multilayer coating tool prepared at low temperature based on atomic layer deposition technology is high. The number of coating layers, coating deposition sequence and coating layer thickness ratio have varying degrees of influence on the cutting force of the nano-multilayer coating tool. The nano-multilayer coating tool is more suitable for high-speed cutting. When the cutting speed is more than 2.33 m / s, the cutting force and friction factor of the nano-multilayer coating tool show a downward trend and good cutting performance. The cutting performance of the double-layer nano-coated tool is better. In high-speed cutting, the surface friction factor of the nano-multilayer coating tool is lower than that of the ordinary uncoated cemented carbide tool, the nano-Al2O3 / TiO2 multilayer coating can effectively reduce the bonding wear of the tool and the phenomenon of tool-chip sticking and "scalding", which can improve the wear resistance of the tool surface.
Key words:  atomic layer deposition  low-temperature preparation  nano-multilayer coating  adhesion of coating-substrate  cutting performance
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