引用本文:杨芳儿,陆诗慧,杨烁妍,高蔓斌,郑晓华.GLC/成分梯度CNx多层膜的微观结构和摩擦学性能[J].中国表面工程,2020,33(6):68~76
Yang Fanger,Lu Shihui,Yang Shuoyan,Gao Manbin,Zheng Xiaohua.Microstructure and Tribological Properties of Magnetron Sputtered Graphite-Like-Carbon / Composition-Gradient CNx Multilayer Films[J].China Surface Engineering,2020,33(6):68~76
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GLC/成分梯度CNx多层膜的微观结构和摩擦学性能
杨芳儿1, 陆诗慧1, 杨烁妍2, 高蔓斌1, 郑晓华1
1.浙江工业大学 材料科学与工程学院, 杭州 310014;2.万向钱潮股份有限公司 等速驱动轴厂质量部, 杭州 311200
摘要:
类金刚石碳膜通常内应力大、结合力低,而多层膜结构可提高结合力。 采用磁控溅射技术在 Si 基体上沉积不同 CNx 层厚度的 GLC/ 成分梯度 CNx 纳米多层膜。 通过扫描电子显微镜(SEM)、X 射线衍射仪(XRD)、X 射线光电子能谱(XPS)、Raman 光谱仪、球盘式摩擦仪、纳米压痕仪等对多层膜的表面形貌、微观结构、力学以及摩擦性能进行分析。 结果表明:多层膜表面平整光滑,CNx 层厚度为 50 nm 的多层膜有明显的层状结构。 多层膜中存在石墨相而 CNx 以微晶或非晶存在。 薄膜的 sp3 键含量、结合力、硬度等均随 CNx 层厚度的增加先增加后减小。 CNx 层厚度对多层膜的大气环境摩擦因数影响很小,但显著降低其真空环境摩擦因数。 多层膜的硬度为( 15 ~ 17. 6) GPa,大气中的磨损率为 (1. 03~ 2. 33)×10-16 m3N-1m-1 ,真空中为(2. 06~ 3. 34)×10-16 m3N-1m-1 。 CNx 层厚度为 20 nm 的多层膜综合性能最佳。
关键词:  多层膜  梯度  CNx  GLC  磁控溅射
DOI：10.11933/j.issn.1007-9289.20201013001
分类号:TG174.44
文章编号:1007-9289(2020)06-0068-09
文献标识码:A
基金项目:浙江省自然科学基金(LY15E010007)； 浙江省重点研发计划(2019C01088)
Microstructure and Tribological Properties of Magnetron Sputtered Graphite-Like-Carbon / Composition-Gradient CNx Multilayer Films
Yang Fanger1, Lu Shihui1, Yang Shuoyan2, Gao Manbin1, Zheng Xiaohua1
1.College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014 , China;2.Quality De- partment of Constant Velocity Drive Shaft Factory, Wanxiang Qianchao Co., Ltd., Hangzhou 311200 , China
Abstract:
Diamond-like-carbon film usually presents high internal stress and poor adhesion, whereas the multilayer architec- ture helps to improve its adhesion. Graphite-like-carbon (GLC) / composition-gradient CNx nano-multilayer films with different thicknesses of CNx single layer were prepared on silicon substrates by magnetron sputtering technique. The surface morpholo- gies, microstructure, mechanical properties and tribological properties of the films were analyzed by SEM, XRD, XPS, Raman spectroscopy, ball-on-disk tribotester and nano-indentation tester, respectively. As the result, the surface of the multilayer film is smooth and the multilayer film with CNx single layer thickness of 50 nm displays an obviously layered structure. Graphitic phase exists in multilayer film while the CNx layers are microcrystalline or amorphous. The content of sp3 hybrid bonds, the ad- hesion and hardness of the film firstly increase and then decrease with the increase of CNx single layer thickness. The thickness of CNx single layer has little effect on the atmospheric friction coefficient of multilayer film, but it significantly reduces the fric- tion coefficient in vacuum environment. The hardness of the multilayer film is (15 ~ 17. 6) GPa, and the wear rate is (1. 03 ~ 2. 33) ×10-16 m3N-1m-1 in air and (2. 06~ 3. 34) ×10-16 m3N-1m-1 in vacuum. The multilayer film with CNx single layer thick- ness of 20 nm shows the best comprehensive performance.
Key words:  multilayer film  gradient  CNx  GLC  magnetron sputtering
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