引用本文:何乃如,王飞飞,吉利,李红轩,陈建敏.Ti、Cr元素在Cr2O3薄膜中的扩散及其对摩擦学性能的影响[J].中国表面工程,2016,29(6):67~74
HE Nai-ru,WANG Fei-fei,JI Li,LI Hong-xuan,CHEN Jian-min.Diffusion Behavior of Ti and Cr Elements in Cr2O3 Film and Its Influence on Tribological Properties[J].China Surface Engineering,2016,29(6):67~74
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Ti、Cr元素在Cr2O3薄膜中的扩散及其对摩擦学性能的影响
何乃如1,2, 王飞飞1,2, 吉利1, 李红轩1, 陈建敏1
1.中国科学院兰州化学物理研究所 固体润滑国家重点实验室, 兰州 730000;2.中国科学院大学, 北京 100049
摘要:
为了研究Ti和Cr元素在Cr2O3薄膜中的扩散行为及其对摩擦学性能的影响，对Cr2O3薄膜在1 000℃大气环境下进行不同保温时间的退火处理。利用扫描电子显微镜、三维轮廓仪、X射线衍射仪以及透射电镜对薄膜的表面形貌、成分以及结构进行分析，采用球盘式摩擦磨损试验机对Cr2O3薄膜的摩擦学性能进行研究。结果表明：在1 000℃下Inconel 718基材中的Ti和Cr会沿着Cr2O3薄膜的晶界扩散至薄膜表面，与大气中的氧反应生成由Cr2O3和Cr2Ti7O17组成的复合相，并在薄膜表面晶界处堆积形成类网状凸起结构。随着保温时间的增加，这种类网状凸起结构的高度也越大。该结构可以显著降低薄膜的摩擦因数以及磨损率。当保温时间只有1 min时，薄膜的平均摩擦因数为0.35，磨损率为5.7 μm3/Nm。而当保温时间达到240 min时，薄膜的摩擦因数降至0.24，磨损率降至3.2 μm3/Nm。
关键词:  Cr2O3薄膜  元素扩散  类网状凸起结构  摩擦与磨损
DOI：10.11933/j.issn.1007-9289.2016.06.010
分类号:
基金项目:国家重点基础研究发展计划（973计划）（2013CB632302）；国家自然科学基金（51505461）
Diffusion Behavior of Ti and Cr Elements in Cr2O3 Film and Its Influence on Tribological Properties
HE Nai-ru1,2, WANG Fei-fei1,2, JI Li1, LI Hong-xuan1, CHEN Jian-min1
1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2.University of Chinese Academy of Sciences, Beijing 100049
Abstract:
In order to study the diffusion behavior of Ti and Cr elements in Cr2O3 film and its effects on the tribological properties, Cr2O3 films were annealed at 1 000℃ in air with different holding time. The surface morphology, composition and structure of the Cr2O3 films after being annealed at 1 000℃ with different holding time were analyzed by SEM, 3D surface mapping profiler, XRD and TEM. The tribological properties of the annealed films were conducted on a ball-on-disc tribometer. The results show that Ti and Cr atoms from Inconel 718 substrate can diffuse along the grain boundaries of the Cr2O3 film to film surface, then react with oxygen and form the mesh-like heave structure that is composed of Cr2O3 and Cr2Ti7O17 phases. The height of the mesh-like heave structure increases with increasing holding time. Moreover, the mesh-like heave structure can evidently reduce the friction coefficient and wear rate of the Cr2O3 film. After being annealed with the holding time of 1 min, the average friction coefficient and wear rate are 0.35 and 5.7 μm3/Nm, respectively. When the holding time reaches 240 min, the average friction coefficient and wear rate decrease to 0.24 and 3.2 μm3/Nm, respectively.
Key words:  Cr2O3 film  elements diffusion  mesh-like heave structure  friction and wear
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