| 引用本文: | 杨武保,吕反修,唐伟忠,刘玉龙,朱克.MPCVD纳米金刚石膜的微观结构及显微力学特性分析[J].中国表面工程,2000,(4):19~21 |
| .The Analysis of Micro-structure and Mechanical behavior of Nano-diamond Films produced by Microwave Plasma Chemical Vapor Deposition[J].China Surface Engineering,2000,(4):19~21 |
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| MPCVD纳米金刚石膜的微观结构及显微力学特性分析 |
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杨武保,吕反修,唐伟忠,刘玉龙,朱克
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| 摘要: |
| 利用微波等离子体化学气相沉积技术在光学玻璃衬底上制备了金刚石膜，利用原子力显微镜技术及显微力学探针研究了膜层的表面形貌及显微力学特性。结果表明，金刚石膜的晶粒尺寸小于１００ｎｍ，表面粗糙度小于１０ｎｍ，具有极高的显微硬度及弹性模量，能够满足光学材料表面的抗冲击，耐磨等要求。 |
| 关键词: 金刚石膜 表面形貌 显微力学特性 MPCVD |
| DOI： |
| 分类号:TG174.444 O484 |
| 基金项目:国家科技攻关项目? |
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| The Analysis of Micro-structure and Mechanical behavior of Nano-diamond Films produced by Microwave Plasma Chemical Vapor Deposition |
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Yang Wubao Lu Fanxiu Tang Weizhong Liu Yulong Zhu Ke
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| Abstract: |
| Lubricous compact and symmetrical diamond films were deposited on glass by MPCVD.It showed that, the surface roughness measured by AFM,was less than 10nm,the the grain size was less than 100 nm,the films surface was quite lubricous. Excellent characteristics of surface mechanical behavior were measured by the nanoindentation methud. |
| Key words: CVD diamond films, surface configuration, nanoindentation |
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